Airborne Molecular Contaminants (AMCs) cause major product quality issues in modern semiconductor fabrication, even at very low levels (ppb concentrations and below). Currently multiple different tools are used to detect certain classes of AMCs with varying degrees of effectiveness.
Selected Ion Flow Tube Mass Spectrometry (SIFT-MS) is a unique analytical tool that provides comprehensive, high-sensitivity detection of volatile organic, and semivolatile organic compounds (VOCs and SVOCs), and inorganic gases (including HCl, HF, and SOx) within seconds. As a single, comprehensive tool with rapid analysis, SIFT-MS provides great economic benefit because it detects and identifies issues faster, resulting in reduced production losses and better quality product.
In collaboration with our US Partner, Quantum Analytics, we recently recorded a webinar that introduces the SIFT-MS technique and its many benefits to AMC monitoring. You can view it here.