• A single analytical tool for chemically diverse AMCs
  • High selectivity and sensitivity (detection limits in ppt range)
  • Simple integration with existing sample delivery infrastructure (single or multiple point)
  • Real-time analysis provides instant feedback on AMC release events

Industry Challenges

  • Modern semiconductor products are often critically impacted by AMCs at low ppb concentrations
  • Traditional analytical tools only detect a fractions of the AMCs, so multiple tools are required
  • VOC detection using GC-MS is particularly troublesome due to slow sample analysis and high maintenance costs

How Syft can help

  • Save money through instantly detecting AMC release and minimizing lost product
  • Increase service life of tools by detecting condensable AMCs immediately
  • Reduce CapEx through applying a single SIFT-MS tool that analyzes all AMCs
  • Save OpEx through much lower maintenance and consumable requirements

Image of the Syft Voice 200 ultra

Voice200ultra

Selected Ion Flow Tube Mass Spectrometry (SIFT-MS)  platform capable of high-throughput gas analysis for VOCs and inorganic gases.

AVI

Auto-validation inlet allows switching between sample, calibration standard, and background gas streams.

MPI

Multi-port inlet enables multiple sample streams to be analyzed (e.g. multiple points in the Fab).

MODBUS / VRC

Remote operation of the Voice200ultra is supported via industry-standard MODBUS or proprietary Voice Remote Control protocols.

LabSyft

Software package for viewing and analyzing SIFT-MS data from multiple instruments, customizing analyses, and interacting with the Voice200ultra.

Compound Library

Access detection and quantitation parameters for over 1000 compounds to leverage the diverse capability of the platform.

Get in touch for more information on our Semiconductor and Cleanroom solutions

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