This webinar will introduce the SIFT-MS technique and its Airborne Molecular Contamination (AMC) monitoring applications.

Vaughan Langford Syft Technologies Director - Applications & Marketing

Dr. Vaughan Langford

BSc(Hons), PhD

Principal Scientist / Consultant
Yan Li Syft Technologies Application Specialist

Yan Li

B.Sc, ME

Sales Manager

Airborne molecular contaminants (AMCs) cause major product quality issues in modern semiconductor fabrication, even at very low concentrations (part-per-billion and below). Currently multiple different analytical tools are used to detect certain classes of AMCs with varying degrees of effectiveness.

Selected ion flow tube mass spectrometry (SIFT-MS) is a unique analytical tool that provides comprehensive, high-sensitivity detection of volatile organic, and semivolatile organic compounds (VOCs and SVOCs), and inorganic gases (including HCl, HF, and SOx) within seconds. As a single, comprehensive tool with rapid analysis, SIFT-MS provides great economic benefit because it detects and identifies a wider range of AMCs issues and does so faster. This results in increased product yield and reduced maintenance and replacement in infrastructure.

This webinar introduces the SIFT-MS technique, compares performance with other detection technologies, and describes its application to AMC monitoring – from the front-opening unified pod (FOUP) to the cleanroom.

For more information on how SIFT-MS can help your business

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