This webinar will introduce the SIFT-MS technique and its Airborne Molecular Contaminant (AMC) monitoring applications.

Vaughan Langford Syft Technologies Director - Applications & Marketing

Dr. Vaughan Langford

BSc(Hons), PhD

Principal Scientist / Consultant
Dr. Yatin J Mange Syft Technologies Application Specialist

Dr. Yatin J. Mange

B.Sc, M.Sc, PhD

Application Specialist / Semiconductor Industry

Airborne molecular contaminants (AMCs) cause major product quality issues in modern semiconductor fabrication, even at very low concentrations (part-per-billion and below). Currently multiple different analytical tools are used to detect certain classes of AMCs with varying degrees of effectiveness.

Selected ion flow tube mass spectrometry (SIFT-MS) is a unique analytical tool that provides comprehensive, high-sensitivity detection of volatile organic, and semivolatile organic compounds (VOCs and SVOCs), and inorganic gases (including HCl, HF, and SOx) within seconds. As a single, comprehensive tool with rapid analysis, SIFT-MS provides great economic benefit because it detects and identifies a wider range of AMCs issues and does so faster. This results in increased product yield and reduced maintenance and replacement in infrastructure.
This webinar introduces the SIFT-MS technique, compares performance with other detection technologies, and describes its application to AMC monitoring – from the front-opening unified pod (FOUP) to the cleanroom.

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