Airborne molecular contaminants (AMCs) cause major product quality issues in modern semiconductor fabrication, even at very low concentrations (part-per-billion and below). Currently multiple different analytical tools are used to detect certain classes of AMCs with varying degrees of effectiveness.
Selected ion flow tube mass spectrometry (SIFT-MS) is a unique analytical tool that provides comprehensive, high-sensitivity detection of volatile organic, and semivolatile organic compounds (VOCs and SVOCs), and inorganic gases (including HCl, HF, and SOx) within seconds. As a single, comprehensive tool with rapid analysis, SIFT-MS provides great economic benefit because it detects and identifies a wider range of AMCs issues and does so faster. This results in increased product yield and reduced maintenance and replacement in infrastructure.
This webinar introduces the SIFT-MS technique, compares performance with other detection technologies, and describes its application to AMC monitoring – from the front-opening unified pod (FOUP) to the cleanroom.